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| 氢气空心阴极放电的模拟研究
摘要
空心阴极放电(HCD)比普通辉光放电更具有独特电光学特性，是当前气体放电领域中十分重要的课题。相比于其他放电结构，空心阴极放电能够产生大量的电子、离子以及激发态原子，并具有非常强烈的阴极溅射，所以在气体激光器研究领域是一种典型的放电结构。其应用范围涉及原子发射光谱、原子吸收光谱、高分辨率光谱、荧光光谱、计量技术、质谱、金属材料化学热处理、等离子体熔炼、真空镀膜以及气体激光技术等广泛领域。最早用于光谱光源，后来发展成为一种很有用的激光放电。其具有工作气压高，维持电压低，粒子数反转浓度大等优点，因此特别适用于金属蒸气离子激光系统。文章采用了矩形结构空心阴极放电模型，研究了氢气及氢氩混合气体的放电特性及气体反应动力学过程，对于放电参数的优化做出了可靠的分析，也为空心阴极放电的其他领域提供了基本理论依据。
本文首先选取了流体模型，采用Bolsig+求解器计算得到不同粒子迁移率系数随约化电场的变化规律，利用计算机模拟，经计算获得了电子密度、离子密度、电场、电离速率、电势以及电子平均能量的空间分布特性，并对矩形空心阴极放电的空间动力学过程进行了研究。数据结果显示，当空心阴极效应形成后，放电参数达到一个稳定的状态，结果表明不同反应过程及放电空间内不同区域能量大小对于粒子密度有着不同程度的影响。此外，本文还考虑了氢分子和氢原子激发态带来的影响，结果表明随着放电的进行，激发态粒子的密度不断增高，所涉及到的激发反应对电子能量变化影响很大。
其次，文章研究了不同的放电参数，即放电电压、气压对空心阴极放电的影响。结果表明：随着电压和气压的升高，电子密度和离子密度均出现增加，放电空腔内形成的高密度等离子体体积也处于增大的状态；电压和气压的改变都会影响径向的电场强度；并发现并不是气压或电压越高，空心阴极效应越明显。
最后，研究了不同氢氩气体比例浓度对空心阴极放电的影响。并将放电空间内电势、径向电场、主要离子密度随氩气浓度增长的变化进行了对比，并分析了不同浓度下各粒子所占比重关系变化，以及主要正负粒子电子和H3+动力学变化过程。
Abstract
Hollow cathode discharge (HCD) has more unique electro-optical characteristics than ordinary glow discharge, and is a very important subject in the current field of gas discharge.Compared with other discharge structures,hollow cathode discharge can generate alarge number of electrons, ions and excited atoms, and has a very strong cathode sputtering, so it is a typical discharge structure in the field of gas laser research.Its application scope covers a wide range of fields such as atomic emission spectroscopy, atomic absorption spectroscopy, high-resolution spectroscopy,fluorescence spectroscopy, metrology, mass spectrometry,chemical heat treatment of metal materials, plasma smelting, vacuum coating, and gas laser technology.It was first used as a spectral light source and later developed into a very useful laser discharge. It has the advantages of high working pressure, low maintenance voltage,and large population inversion concentration, so it is especially suitable for metal vapor ion laser systems.The article adopts a rectangular structure hollow cathode discharge model to study the discharge characteristics and gas reaction dynamics of hydrogen and hydrogen-argonmixed gas, and makes a reliable analysis for the optimization of discharge parameters. It also provides a basic theoretical basis for other fields of hollow cathode discharge.
This paper first selects the fluid model,uses the Bolsig+ solver to calculate thevariation of different particle mobilitycoefficients with the reduced electric field, and uses computer simulation to obtain the electron density, ion density, electric field, ionization rate, electric potential, and the average energy of electrons. The spatial distribution characteristics of the rectangular hollow cathode discharge are studied.The data results show that when the hollow cathode effectis formed, the discharge parameters reach a stable state. The results show that different reaction processes and the energy of different regions in the discharge space have different degrees of influence on the particle density. In addition, this article also considers the influence ofthe excited states of hydrogen molecules and hydrogen atoms. The results show that with the progress of the discharge,the density of excited particles increases,and the involved excitation reactions have a great influence on the change of electron energy.
Secondly, the article studies the influence of different discharge parameters,namely the discharge voltage and air pressure on the hollow cathode discharge.The results show that with the increase of voltage and gas pressure,the electron density and ion density both increase,and the volume of the high-density plasma formed in the discharge cavity is also increasing. Changes in voltage and air pressure will affect the radial electric field strength.We found that it is not that the higher the air pressure orvoltage, the more obvious the hollow cathode effect.
Finally, the effects of different hydrogen and argon gas concentrations on the discharge of the hollow cathode are studied. The changes in the electric potential, radial electric field,and main ion density in the discharge space with the increaseof argon concentration were compared,and the changes in the proportion of each particle under different concentrations, as well as the main positive and negative particle electrons and H3+ dynamic changes were analyzed. process.
Key words：hollow cathode discharge excited particles fluid model dynamic process Bolsig+ solver
Abstract
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